XY_工作台六自由度误差在线测量和补偿

XY_工作台六自由度误差在线测量和补偿

第 31 卷第 12 期2023 年 6 月

Vol.31 No.12

Jun. 2023光学精密工程

Optics and Precision Engineering

XY工作台六自由度误差在线测量和补偿

林荣炜，程真英*，何亚雄，李洁，李瑞君

（合肥工业大学仪器科学与光电工程学院

测量理论与精密仪器安徽省重点实验室，安徽合肥 230009）

摘要：为提高XY工作台对应功能点的空间位置精度，提出了一种六自由度（6-DOF）误差在线测量方法，并建立了相应的误差补偿模型。采用激光干涉原理测量工作台X，Y轴方向的定位误差和Z轴方向的直线度误差，采用激光自准直原理测量工作台绕X，Y，Z轴转动的角度误差，从而实现6-DOF误差的在线测量。分析了6-DOF误差造成工作台对应功能点的空间位置误差，建立了基于阿贝原则和布莱恩原则的误差补偿模型。根据提出的测量方法，研制了一套高精度紧凑型的在位、在线6-DOF测量系统，将其应用于一台微纳米三坐标测量机的工作台上；以SIOS激光干涉仪为参考，对测量系统和误差补偿模型的有效性进行了实验验证，并评定了系统的不确定度。结果表明：经过6-DOF误差测量和补偿后，参考功能点在X，Y，Z向的最大位置误差由1.7 μm，3.4 μm，3 μm分别减小至65 nm，81 nm，109 nm，其扩展不确定度分别为90 nm，98 nm，158 nm（k=2）。该方法和系统可被用于提高XY工作台的精度。

关键词：XY工作台；多自由度；补偿模型；阿贝原则

中图分类号：TP394.1；TH691.9 文献标识码：A doi：10.37188/OPE.20233112.1761

On-line six-degree-of-freedom errors measurement and

compensation for XY stages

LIN Rongwei，CHENG Zhenying*，HE Yaxiong，LI Jie，LI Ruijun

（Anhui Province Key Laboratory of Measuring Theory and Precision Instrument，School of Instrument Science and Opto-electronic Engineering，Hefei University of Technology，Hefei 230009，China）* Corresponding author， E-mail： chengzhenying01@hfut.edu.cn

Abstract： An on-line six-degree-of-freedom （6-DOF） error measurement method and compensation mod el for XY stages were devised for improving the volumetric positional accuracy of the functional point. The positioning errors in the X- and Y-directions of the stage and the straightness error in the Z-direction were measured via laser interferometry，and the three angular motion errors around the X-，Y-，and Z-axes were measured using laser autocollimators. The volumetric positional errors of the functional point caused by the 6-DOF errors of the stage was analyzed， and an error compensation model based on the Abbe and Bryan principle was developed.An in-situ and on-line 6-DOF error measurement system based on the measurement method was developed and applied to a micro-nano coordinate measuring machine，which had high precision and a compact design. The capability of the system and the effectiveness of the model were experimentally verified， and the measurement uncertainty of the system was evaluated. SIOS laser 文章编号1004-924X（2023）12-1761-13

收稿日期：2022-11-16；修订日期：2022-12-17.

基金项目：国家自然科学基金资助项目（No.52175506）；国家重点研发计划资助项目（No. 2019YFB2004900）

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