2002Update_Factory

ITRS2002

2002 Update Tables 79

FACTORY INTEGRATION

Table 65 Factory Integration Difficult Challenges []

Difficult Challenges65 nm,

Through 2007

Increasing rate of new product and technology introductions Globally disparate factories run as single “virtual factory” Need to meet regulations in different geographical areas Effectively manage complex supply chains Increasing process and product complexity

Explosive growth of data collection/analysis requirements

Increasing number of processing steps including material movements

Multiple lots in a carrier and single wafer control/transport for an equipment group Multiple Products on a wafer Multiple package form factors

Larger wafers and carriers driving ergonomic solutions

Increasing expectations for integrated material handling and software control systems Increased reliance on factory information and control systems Multiple information and control system interdependencies

Standalone and Integrated Reliability required to keep factories operating

Co-existence of new factory information and control systems with existing (legacy) systems Pace of standards definition and implementation is not meeting factory integration needs Addressing complexity while keeping costs in perspective

Rapid changes to business needs, demand, and globalization trends Increasing rate of new product and technology introductions Globally disparate factories run as single “virtual factory” Need to meet regulations in different geographical areas Effectively manage complex supply chains Increasing process and product complexity

Increasing number of processing steps including material movements

Multiple lots in a carrier and single wafer control/transport for an equipment group

Is

Complexity Management

Increasing expectations for integrated material handling and software control systems Increased reliance on factory information and control systems Multiple information and control system interdependencies

Standalone and Integrated Reliability required to keep factories operating

Addressing complexity while keeping costs in perspectiveFactory Optimization

Increased customer expectation to meet on time delivery Balanced throughput and cycle time

Reduce time to ramp factories, products, and processes Increased urgency for improved factory effectiveness

Ability to measure effectiveness and adjust/optimize factory output High factory yield at startup

Reduce effects of parametric variation Reduce wafer and product cost

Satisfy all domestic and international regulations Increased customer expectation to meet on time delivery

Is

Factory Optimization

Reduce time to ramp factories, products, and processes

Ability to measure effectiveness and adjust/optimize factory output High factory yield at startup

Reduce effects of parametric variation

Satisfy all domestic and international regulation

THE INTERNATIONAL TECHNOLOGY ROADMAP FOR SEMICONDUCTORS: 2002 UPDATE

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